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2019-2020 Undergraduate & Graduate Catalog


EGR 559 - Micro/Nanosystem Engineering

This is a second course in the nanotechnology sequence. Topics include micro/nano systems and micro/nano devices, essential electrical and mechanical concepts, sensing and actuation concepts, applications like piezoresistivity, micro/nanosystems design, and micro/nano fabrication processes, including assembly, packaging, and testing. Laboratory includes hands-on projects. Cross-listed with EGR 459. Offered fall semester.

Credits: 4



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