2016-2017 Undergraduate & Graduate Catalog
EGR 559 - Micro/Nanosystem Engineering
This is a second course in the nanotechnology sequence. Topics include micro/nano systems and micro/nano devices, essential electrical and mechanical concepts, sensing and actuation concepts, applications like piezoresistivity, micro/nanosystems design, and micro/nano fabrication processes, including assembly, packaging, and testing. Laboratory includes hands-on projects. Crosslisted with EGR 459. Course offered fall semester.
Credits: 4